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Other articles related with "inductively coupled plasma"：
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95205 |
Ying-Jie Wang(王英杰), Jia-Wei Huang(黄佳伟), Quan-Zhi Zhang(张权治), Yu-Ru Zhang(张钰如), Fei Gao(高飞), and You-Nian Wang(王友年) |
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Numerical investigation of radio-frequency negative hydrogen ion sources by a three-dimensional fluid model |
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Chin. Phys. B
2021 Vol.30 (9): 95205-095205
[Abstract]
(438)
[HTML 1 KB]
[PDF 1778 KB]
(200)
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65201 |
Ming-Hao Yu(喻明浩), Zhe Wang(王哲), Ze-Yang Qiu(邱泽洋), Bo Lv(吕博), and Bo-Rui Zheng(郑博睿) |
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Numerical simulation and experimental validation of multiphysics field coupling mechanisms for a high power ICP wind tunnel |
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Chin. Phys. B
2021 Vol.30 (6): 65201-065201
[Abstract]
(456)
[HTML 0 KB]
[PDF 4229 KB]
(132)
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65202 |
Wei Liu(刘巍), Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), You-Nian Wang(王友年), and Yong-Tao Zhao(赵永涛) |
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Time-resolved radial uniformity of pulse-modulated inductively coupled O2/Ar plasmas |
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Chin. Phys. B
2021 Vol.30 (6): 65202-065202
[Abstract]
(400)
[HTML 0 KB]
[PDF 945 KB]
(103)
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55201 |
Shu-Xia Zhao(赵书霞) |
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Quasi-delta negative ions density of Ar/O2 inductively coupled plasma at very low electronegativity |
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Chin. Phys. B
2021 Vol.30 (5): 55201-055201
[Abstract]
(468)
[HTML 1 KB]
[PDF 7838 KB]
(72)
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45202 |
Xiang-Yun Lv(吕翔云), Fei Gao(高飞), Quan-Zhi Zhang(张权治), and You-Nian Wang(王友年) |
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Spatio-temporal measurements of overshoot phenomenon in pulsed inductively coupled discharge |
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Chin. Phys. B
2021 Vol.30 (4): 45202-
[Abstract]
(397)
[HTML 1 KB]
[PDF 1387 KB]
(270)
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48103 |
Yudong Zhang(张玉栋), Jiale Tang(唐家乐), Yongjie Hu(胡永杰), Jie Yuan(袁杰), Lulu Guan(管路路), Xingyu Li(李星雨), Hushan Cui(崔虎山), Guanghui Ding(丁光辉), Xinying Shi(石新颖), Kaidong Xu(许开东), and Shiwei Zhuang(庄仕伟) |
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Effect of hydrogen content on dielectric strength of the silicon nitride film deposited by ICP-CVD |
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Chin. Phys. B
2021 Vol.30 (4): 48103-
[Abstract]
(421)
[HTML 1 KB]
[PDF 648 KB]
(106)
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35202 |
Peng-Cheng Du(杜鹏程), Fei Gao(高飞, Xiao-Kun Wang(王晓坤), Yong-Xin Liu(刘永新), and You-Nian Wang(王友年) |
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Measurement of electronegativity during the E to H mode transition in a radio frequency inductively coupled Ar/O2 plasma |
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Chin. Phys. B
2021 Vol.30 (3): 35202-
[Abstract]
(348)
[HTML 1 KB]
[PDF 665 KB]
(222)
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124701 |
Shu-Xia Zhao(赵书霞), Zhao Feng(丰曌) |
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Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows |
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Chin. Phys. B
2018 Vol.27 (12): 124701-124701
[Abstract]
(670)
[HTML 1 KB]
[PDF 2982 KB]
(183)
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45202 |
Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), Jia Liu(刘佳), You-Nian Wang(王友年) |
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Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas |
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Chin. Phys. B
2018 Vol.27 (4): 45202-045202
[Abstract]
(582)
[HTML 1 KB]
[PDF 1301 KB]
(233)
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75203 |
Zhen-Hua Bi(毕振华), Yi Hong(洪义), Guang-Jiu Lei(雷光玖), Shuai Wang(王帅), You-Nian Wang(王友年), Dong-Ping Liu(刘东平) |
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Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics |
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Chin. Phys. B
2017 Vol.26 (7): 75203-075203
[Abstract]
(830)
[HTML 1 KB]
[PDF 1566 KB]
(185)
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37201 |
Lei Wang(王磊), Jiaqi Zhang(张家琦), Liuan Li(李柳暗), Yutaro Maeda(前田裕太郎), Jin-Ping Ao(敖金平) |
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Plasma-assisted surface treatment for low-temperature annealed ohmic contact on AlGaN/GaN heterostructure field-effect transistors |
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Chin. Phys. B
2017 Vol.26 (3): 37201-037201
[Abstract]
(684)
[HTML 1 KB]
[PDF 311 KB]
(338)
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38503 |
Liuan Li(李柳暗), Jiaqi Zhang(张家琦), Yang Liu(刘扬), Jin-Ping Ao(敖金平) |
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Evaluation of a gate-first process for AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors with low ohmic annealing temperature |
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Chin. Phys. B
2016 Vol.25 (3): 38503-038503
[Abstract]
(813)
[HTML 0 KB]
[PDF 371 KB]
(378)
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115201 |
Xu Hui-Jing (徐会静), Zhao Shu-Xia (赵书霞), Gao Fei (高飞), Zhang Yu-Ru (张钰如), Li Xue-Chun (李雪春), Wang You-Nian (王友年) |
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Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model |
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Chin. Phys. B
2015 Vol.24 (11): 115201-115201
[Abstract]
(509)
[HTML 1 KB]
[PDF 380 KB]
(534)
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115202 |
Gao Fei (高飞), Zhang Yu-Ru (张钰如), Zhao Shu-Xia (赵书霞), Li Xue-Chun (李雪春), Wang You-Nian (王友年) |
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Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias |
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Chin. Phys. B
2014 Vol.23 (11): 115202-115202
[Abstract]
(657)
[HTML 1 KB]
[PDF 255 KB]
(384)
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115205 |
Gao Fei (高飞), Liu Wei (刘巍), Zhao Shu-Xia (赵书霞), Zhang Yu-Ru (张钰如), Sun Chang-Sen (孙长森), Wang You-Nian (王友年) |
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Changes of the electron dynamics in hydrogen inductively coupled plasma |
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Chin. Phys. B
2013 Vol.22 (11): 115205-115205
[Abstract]
(465)
[HTML 1 KB]
[PDF 338 KB]
(645)
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75203 |
Gao Fei(高飞), Li Xue-Chun(李雪春), Zhao Shu-Xia(赵书霞), and Wang You-Nian(王友年) |
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Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition |
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Chin. Phys. B
2012 Vol.21 (7): 75203-075203
[Abstract]
(1444)
[HTML 1 KB]
[PDF 1988 KB]
(1142)
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77303 |
Lin Fang(林芳), Shen Bo(沈波), Lu Li-Wu(卢励吾), Liu Xin-Yu(刘新宇), Wei Ke(魏珂), Xu Fu-Jun(许福军), Wang Yan(王彦), Ma Nan(马楠), and Huang Jun(黄俊) |
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Identification and elimination of inductively coupled plasma-induced defects in AlxGa1 - xN/GaN heterostructures |
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Chin. Phys. B
2011 Vol.20 (7): 77303-077303
[Abstract]
(1339)
[HTML 1 KB]
[PDF 399 KB]
(774)
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773 |
Wang Jin-Xiao(王金晓), Qin Yan-Li(秦艳丽), Yan Heng-Qing(闫恒庆), Gao Ping-Qi(高平奇), Li Jun-Shuai(栗军帅), Yin Min(尹旻), and He De-Yan(贺德衍) |
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Columnar growth of crystalline silicon films on aluminium-coated glass by inductively coupled plasma CVD at room temperature |
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Chin. Phys. B
2009 Vol.18 (2): 773-777
[Abstract]
(1137)
[HTML 0 KB]
[PDF 2786 KB]
(572)
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4242 |
Xu Xu (徐 旭), Li Lin-Sen (李林森), Liu Feng (刘 峰), Zhou Qian-Hong (周前红), Liang Rong-Qing (梁荣庆) |
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Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna |
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Chin. Phys. B
2008 Vol.17 (11): 4242-4246
[Abstract]
(1391)
[HTML 0 KB]
[PDF 611 KB]
(659)
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2044 |
Mao Ming(毛明), Wang Shuai(王帅), Dai Zhong-Ling(戴忠玲), and Wang You-Nian(王友年) |
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RF electric field penetration and power deposition into nonequilibrium planar-type inductively coupled plasmas |
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Chin. Phys. B
2007 Vol.16 (7): 2044-2050
[Abstract]
(1319)
[HTML 0 KB]
[PDF 1009 KB]
(567)
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